Trusted by leading university nanofabrication facilities

Precision Environments for Advanced Research

ISO-certified cleanroom systems engineered to the exacting standards of university nanofabrication labs and cutting-edge R&D programs. From softwall suites to hardwall facilities.

Our Systems

Built for the Lab.
Specified for the Paper.

UHPLab Cleanroom System
Cleanroom Systems

ISO Class 3–7 Environments

Modular cleanroom suites from 10 m² to 500 m². HEPA/ULPA filtration, positive pressure control, and full process qualification documentation included with every installation.

Softwall Cleanrooms

Flexible, cost-effective ISO Class 5–7 environments. Rapid deployment for university labs with limited infrastructure.

  • ISO Class5 – 7
  • Footprint10 – 100 m²
  • Deploy Time< 2 weeks
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Hardwall Cleanrooms

Permanent, high-performance ISO Class 3–6 suites. Full structural integration with building HVAC and utilities.

  • ISO Class3 – 6
  • Footprint20 – 500 m²
  • CertificationISO 14644-1
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Minienvironments

Localized ISO Class 1–4 enclosures for ultra-sensitive processes. Ideal for wafer handling, lithography, and inspection.

  • ISO Class1 – 4
  • Footprint1 – 10 m²
  • Particle Count< 0.01 µm
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Why UHPLab

The Standard That Research Demands

01

Contamination Control

ISO Class 3–7 environments with HEPA/ULPA filtration, positive pressure control, and continuous particle monitoring. Sub-0.1 µm particle counts maintained under full operational load.

02

Laminar Airflow Design

Precision-engineered airflow patterns eliminate turbulence and cross-contamination. Unidirectional flow rates from 0.3 to 0.5 m/s maintained uniformly across the entire work envelope.

03

Modular Architecture

Bolt-on expansion modules allow cleanroom footprint scaling from 10 m² to 500 m² without process interruption. Reconfigurable wall systems adapt to evolving research requirements.

04

Research-Grade Specifications

Every system ships with full metrology data, process qualification reports, and NIST-traceable calibration certificates — the documentation standard demanded by peer-reviewed research.

Research Domains

Where UHPLab Cleanrooms Work

University nanofabrication lab
CMOS / FinFETSemiconductor Research
EUV / DUV / i-linePhotolithography
Micro-ElectromechanicalMEMS Fabrication
Qubit / Josephson JunctionsQuantum Devices
Perovskite / III-VPhotovoltaics
Implant / BiosensorBiomedical Coatings
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Ready to spec your cleanroom?

Talk to our engineers. We'll help you define the right ISO class, footprint, airflow configuration, and process parameters for your research program.